The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Nov. 14, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Christopher Maher, Campbell, CA (US);
Bjorn Brauer, Beaverton, OR (US);
Vijayakumar Ramachandran, Sunnyvale, CA (US);
Laurent Karsenti, Rehovot, IL;
Eliezer Rosengaus, Palo Alto, CA (US);
John R. Jordan, III, Mountain View, CA (US);
Roni Miller, Hod Hasharon, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A defect detection method includes acquiring a reference image; selecting a target region of the reference image; identifying, based on a matching metric, one or more comparative regions of the reference image corresponding to the target region; acquiring a test image; masking the test image with the target region of the reference image and the one or more comparative regions of the reference image; defining a defect threshold for the target region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image contains a defect based on the defect threshold.