The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Oct. 15, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Jan Lauber, San Francisco, CA (US);
Himanshu Vajaria, Milpitas, CA (US);
Yong Zhang, Cupertino, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G06T 7/00 (2017.01); G06T 7/73 (2017.01); G06T 7/33 (2017.01); G06T 3/00 (2006.01); G06T 3/20 (2006.01); G06T 3/60 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G06T 3/0068 (2013.01); G06T 3/20 (2013.01); G06T 3/608 (2013.01); G06T 7/001 (2013.01); G06T 7/337 (2017.01); G06T 7/74 (2017.01); G06T 2207/20021 (2013.01); G06T 2207/20056 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A die-die inspection image can be aligned using a method or system configured to receive a reference image and a test image, determine a global offset and rotation angle from local sections on the reference image and test image, and perform a rough alignment de-skew of the test image prior to performing a fine alignment.