The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Oct. 13, 2016
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Keigo Kasuya, Tokyo, JP;
Noriaki Arai, Tokyo, JP;
Toshiaki Kusunoki, Tokyo, JP;
Takashi Ohshima, Tokyo, JP;
Tomihiro Hashizume, Tokyo, JP;
Yusuke Sakai, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeBfor the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.