The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
May. 31, 2018
Disco Corporation, Tokyo, JP;
Jinyan Zhao, Tokyo, JP;
Yoshiaki Yodo, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
An expanding method for expanding an expandable sheet is provided. A wafer is attached to a central portion of the expandable sheet and an annular frame is attached to a peripheral portion of the expandable sheet. The expanding method includes an annular frame holding step of holding the annular frame by using a holding unit, an expanding step of pushing the expandable sheet by using a pushing unit, thereby expanding the expandable sheet, a suction holding step of holding the wafer through the expandable sheet on a holding table under suction, and a push force removing step of removing a push force applied from the pushing unit to the expandable sheet. A minute projection for preventing the shrinkage of the expandable sheet is formed on the holding table along the outer circumference thereof.