The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Jan. 04, 2019
Applicant:
Ihi Corporation, Koto-ku, JP;
Inventors:
Yuuta Ootsuka, Tokyo, JP;
Yasutomo Tanaka, Tokyo, JP;
Wataru Kubota, Tokyo, JP;
Masato Ishizaki, Tokyo, JP;
Assignee:
IHI Corporation, Koto-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D 45/08 (2006.01); B01D 53/00 (2006.01); B01D 53/74 (2006.01); C23C 16/44 (2006.01); C01B 32/977 (2017.01); B01D 53/70 (2006.01); H01L 21/205 (2006.01);
U.S. Cl.
CPC ...
B01D 45/08 (2013.01); B01D 53/005 (2013.01); B01D 53/70 (2013.01); B01D 53/74 (2013.01); C01B 32/977 (2017.08); C23C 16/44 (2013.01); C23C 16/4412 (2013.01); H01L 21/205 (2013.01); B01D 2257/553 (2013.01); B01D 2257/556 (2013.01); B01D 2258/0216 (2013.01); C23C 2222/20 (2013.01);
Abstract
A reheating collection device for a gas phase process is provided with a container elongated in an axial direction along an axis to define a chamber, an inflow path and an exhaust path respectively in communication with the chamber and apart in the axial direction from each other, and a heater heating the chamber between the inflow path and the exhaust path.