The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Jun. 16, 2017
Applicant:
X-fab Semiconductor Foundries Ag, Erfurt, DE;
Inventors:
Assignee:
X-FAB SEMICONDUCTOR FOUNDRIES GMBH, Erfurt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01); G01K 7/00 (2006.01); G01J 5/14 (2006.01); G01K 7/02 (2006.01); H01L 35/04 (2006.01); H01L 35/30 (2006.01); H01L 35/34 (2006.01);
U.S. Cl.
CPC ...
G01J 5/14 (2013.01); G01K 7/02 (2013.01); H01L 35/04 (2013.01); H01L 35/30 (2013.01); H01L 35/34 (2013.01);
Abstract
A semiconductor product comprising: a semiconductor substrate and a test structure, the test structure comprising: a thermopile and at least one temperature sensitive element, the at least one temperature sensitive element being located in the substrate, or between the substrate and the thermopile.