The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Mar. 11, 2019
Applicant:
Uwiz Technology Co., Ltd., Taoyuan, TW;
Inventors:
Yun-Lung Ho, Miaoli County, TW;
Chung-Wei Chiang, Taoyuan, TW;
Song-Yuan Chang, Chiayi County, TW;
Ming-Hui Lu, Taipei, TW;
Ming-Che Ho, Taoyuan, TW;
Assignee:
UWIZ Technology Co., Ltd., Taoyuan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/321 (2006.01); B24B 37/24 (2012.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); H01L 21/3212 (2013.01); B24B 37/24 (2013.01);
Abstract
Provided is a slurry composition including abrasive particles, halogen oxide, and nitroxide compound. The combination of halogen oxide and nitroxide compound has a synergistic effect to remove a substrate containing tungsten and silicon oxide. Moreover, a use of the slurry composition and a polishing method using the slurry composition are provided.