Reliability testing method

Abstract

Disclosed is a chip reliability testing method that includes mounting a test chip on a test board whereby each test circuit of the test chip is connected to a different pair of input and output terminals. The reliability test can include applying a test voltage to a first (input) bump and measuring an output voltage on a second (output) bump connected to the same test circuit. The first and second bumps are, in turn, electrically connected to each other through a series of conductive materials to define the test circuit. The conductive materials include first and second contact pads under the first and second bumps with the contact pads, in turn, being connected to a conductive substrate or redistribution layer. The conductive substrate or redistribution layer is, in turn, connected to first and second conductive vias that each provide a connection to one or more of a series of conductive layers that are arranged under the conductive substrate or redistribution layer and over a silicon device. A series of dielectric layers are provided between the conductive substrate or redistribution layer, the conductive layers, and the silicon device.