The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Aug. 03, 2011
Hans-juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Erik Loopstra, Eindhoven, NL;
David R. Shafer, Fairfield, CT (US);
Hans-Juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
Erik Loopstra, Eindhoven, NL;
David R. Shafer, Fairfield, CT (US);
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An imaging optical system has a plurality of mirrors which image an object field in an object plane in an image field in an image plane. The imaging optical system has a pupil obscuration. The last mirror in the beam path of the imaging light between the object field and the image field has a through-opening for the passage of the imaging light. A penultimate mirror of the imaging optical system in the beam path of the imaging light between the object field and the image field has no through-opening for the passage of the imaging light. The result is an imaging optical system that provides a combination of small imaging errors, manageable production and a good throughput for the imaging light.