The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Dec. 14, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Patrick Warnaar, Tilburg, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Grzegorz Grzela, Utrecht, NL;
Erik Johan Koop, Eindhoven, NL;
Victor Emanuel Calado, Rotterdam, NL;
Si-Han Zeng, New Taipei, TW;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7065 (2013.01); G01N 21/47 (2013.01); G03F 7/70633 (2013.01);
Abstract
A method of measuring a property of a substrate, the substrate having a plurality of targets formed thereon, the method comprising: