The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Jan. 25, 2016
Applicants:

Samsung Display Co., Ltd., Yongin-si, KR;

Dongwoo Fine-chem Co., Ltd., Iksan-si, KR;

Inventors:

Soomin An, Yongin-si, KR;

Youngjun Kim, Yongin-si, KR;

Hongsick Park, Yongin-si, KR;

Inseol Kuk, Iksan-si, KR;

Youngchul Park, Iksan-si, KR;

Inho Yu, Iksan-si, KR;

Seungsoo Lee, Iksan-si, KR;

Jongmun Lee, Iksan-si, KR;

Daesung Lim, Iksan-si, KR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/18 (2006.01); C23F 1/26 (2006.01); H01L 27/12 (2006.01); H01L 21/3213 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); C23F 1/26 (2013.01); H01L 21/32134 (2013.01); H01L 27/1244 (2013.01); H01L 27/1259 (2013.01); H01L 29/4908 (2013.01);
Abstract

An etchant composition includes an etchant composition that includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.1 wt % to about 10 wt % of an aliphatic sulfonic acid, about 1 wt % to about 20 wt % of an organic acid or an organic acid salt, and water based on a total weight of the etchant composition.


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