The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Apr. 25, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
He Ren, San Jose, CA (US);
Jie Zhou, San Jose, CA (US);
Guannan Chen, Sunnyvale, CA (US);
Michael W. Stowell, Loveland, CO (US);
Bencherki Mebarki, Santa Clara, CA (US);
Mehul Naik, San Jose, CA (US);
Srinivas D. Nemani, Sunnyvale, CA (US);
Nikolaos Bekiaris, Campbell, CA (US);
Zhiyuan Wu, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/285 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76883 (2013.01); H01L 21/28556 (2013.01); H01L 21/76877 (2013.01); H01L 23/53209 (2013.01);
Abstract
An integrated circuit is fabricated by chemical vapor deposition or atomic layer deposition of a metal film to metal film.