The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2019
Filed:
Jul. 20, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Seung-Ho Park, Suwon-si, KR;
Ki-Hwa Jung, Cheongju-si, KR;
Sang-Kyun Kim, Hwaseong-si, KR;
Jun-Ha Hwang, Pyeongtaek-si, KR;
Chang-Gil Kwon, Namyangju-si, KR;
Seung-Yeop Baek, Suwon-si, KR;
Jae-Woo Lee, Anseong-si, KR;
Ji-Sung Lee, Hwaseong-si, KR;
Jae-Kwang Choi, Suwon-si, KR;
Jin-Myung Hwang, Changwon-si, KR;
Assignees:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;
K.C. Tech Co., Ltd., Anseong-si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/76 (2006.01); H01L 21/82 (2006.01); C09G 1/02 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 21/3105 (2006.01); H01L 29/78 (2006.01); H01L 21/8238 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); H01L 21/31053 (2013.01); H01L 21/76224 (2013.01); H01L 21/76229 (2013.01); H01L 21/823821 (2013.01); H01L 29/0649 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7853 (2013.01);
Abstract
A polishing composition includes abrasive particles, a pyrrolidone containing a hydrophilic group, a dispersing agent, a first dishing inhibitor including polyacrylic acid, and a second dishing inhibitor including a non-ionic polymer.