The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2019

Filed:

May. 09, 2016
Applicant:

Tanaka Kikinzoku Kogyo K.k., Chiyoda-ku, Tokyo, JP;

Inventors:

Ryosuke Harada, Tsukuba, JP;

Toshiyuki Shigetomi, Tsukuba, JP;

Shunichi Nabeya, Tsukuba, JP;

Kazuharu Suzuki, Tsukuba, JP;

Akiko Kumakura, Tsukuba, JP;

Tatsutaka Aoyama, Tsukuba, JP;

Takayuki Sone, Tsukuba, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C07F 13/00 (2006.01); C07F 15/00 (2006.01); C23C 16/16 (2006.01); C07F 15/06 (2006.01); C07F 19/00 (2006.01); C07C 251/08 (2006.01); C23C 16/18 (2006.01); H01L 21/285 (2006.01); H01L 21/31 (2006.01); C23C 16/06 (2006.01); C23C 16/46 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C07F 15/0046 (2013.01); C07C 251/08 (2013.01); C07F 13/00 (2013.01); C07F 15/00 (2013.01); C07F 15/06 (2013.01); C07F 19/00 (2013.01); C23C 16/06 (2013.01); C23C 16/18 (2013.01); C23C 16/46 (2013.01); H01L 21/285 (2013.01); H01L 21/31 (2013.01); H01L 21/02194 (2013.01); H01L 21/02271 (2013.01);
Abstract

A heterogeneous polynuclear complex for use as a raw material in the chemical deposition of composite metal or composite metal thin films with the below formula. In the formula, Mand Mare mutually different transition metals, x is an integer of 0 or more and 2 or less, y is in integer of 1 or more and 2 or less, z is an integer of 1 or more and 10 or less, Rto Rare each one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less, and Ris a hydrogen atom, a carbonyl, an alkyl group with a carbon number of 1 or more and 7 or less, an allyl group or an allyl derivative. The heterogeneous polynuclear complex allows a composite metal thin film or a composite metal compound thin film containing a plurality of metals to be formed from a single raw material.


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