The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Mar. 19, 2018
Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;
Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;
Hao Deng, Shanghai, CN;
Jianhua Xu, Shanghai, CN;
Feng Zhou, Shanghai, CN;
Xiaojun Yang, Shanghai, CN;
Abstract
A method for manufacturing a semiconductor device includes providing a semiconductor structure having a semiconductor substrate, a dielectric layer on the semiconductor substrate, and a hardmask on a second portion of the dielectric layer while exposing a first portion of the dielectric layer; forming a copolymer on the semiconductor structure; performing an annealing treatment such that the copolymer forms a staggered configuration of a first monomer and a second monomer; removing the first monomer; performing a first etching process on the first portion using the second monomer as a mask to form a first trench extending to the semiconductor substrate; removing the second monomer and the first hardmask; and epitaxially growing a first semiconductor fin in the first trench.