The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2019
Filed:
Nov. 21, 2016
Versum Materials Us, Llc, Tempe, AZ (US);
Wen Dar Liu, Chupei, TW;
Yi-Chia Lee, Chupei, TW;
Tianniu Chen, Westford, MA (US);
Thomas Mebrahtu, Lansdale, PA (US);
Aiping Wu, Macungie, PA (US);
Edward Chia Kai Tseng, St. Taoyuan, TW;
Gene Everad Parris, Coopersburg, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
A composition and method using same useful for etching a semiconductor substrate comprising: from about 25 to 86% by weight of water; from about 0 to about 60% by weight of a water-miscible organic solvent; from about 1 to about 30% by weight of a base comprising a quartenary ammonium compound; from about 1 to about 50% by weight of an amine compound wherein the amine compound is selected from the group consisting of a secondary amine, a tertiary amine, and mixtures thereof; from about 0 to about 5% by weight of a buffering agent; from about 0 to about 15% by weight of a corrosion inhibitor.