The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2019
Filed:
Sep. 06, 2016
Asml Netherlands B.v., Veldhoven, NL;
Nitesh Pandey, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Heine Melle Mulder, Veldhoven, NL;
Willem Richard Pongers, Veldhoven, NL;
Paulus Antonius Andreas Teunissen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A topography measurement system comprising a radiation source configured to generate a radiation beam, a spatially coded grating configured to pattern the radiation beam and thereby provide a spatially coded radiation beam, optics configured to form an image of the spatially coded grating at a target location on a substrate, detection optics configured to receive radiation reflected from the target location of the substrate and form an image of the grating image at a second grating, and a detector configured to receive radiation transmitted through the second grating and produce an output signal.