The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2019

Filed:

Jan. 10, 2018
Applicant:

Shinko Electric Industries Co., Ltd., Nagano-shi, Nagano-ken, JP;

Inventors:

Noriyoshi Shimizu, Nagano, JP;

Yusuke Gozu, Nagano, JP;

Jun Furuichi, Nagano, JP;

Akio Rokugawa, Nagano, JP;

Takashi Ito, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H05K 1/11 (2006.01); H01L 23/00 (2006.01); H05K 3/46 (2006.01); H05K 1/09 (2006.01); H01L 23/538 (2006.01); H01L 25/065 (2006.01); H01L 25/10 (2006.01); H05K 3/00 (2006.01); H05K 3/38 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49822 (2013.01); H01L 23/49811 (2013.01); H01L 23/49827 (2013.01); H01L 24/32 (2013.01); H05K 1/111 (2013.01); H05K 1/112 (2013.01); H05K 1/115 (2013.01); H05K 3/4644 (2013.01); H01L 23/49816 (2013.01); H01L 23/49833 (2013.01); H01L 23/49894 (2013.01); H01L 23/5389 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/29 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01); H01L 25/0655 (2013.01); H01L 25/105 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13111 (2013.01); H01L 2224/13116 (2013.01); H01L 2224/13144 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/16237 (2013.01); H01L 2224/16238 (2013.01); H01L 2224/26175 (2013.01); H01L 2224/2919 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/32237 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/8149 (2013.01); H01L 2224/81191 (2013.01); H01L 2224/81444 (2013.01); H01L 2224/81447 (2013.01); H01L 2224/81801 (2013.01); H01L 2224/83104 (2013.01); H01L 2224/83855 (2013.01); H01L 2224/92125 (2013.01); H01L 2225/1023 (2013.01); H01L 2225/1041 (2013.01); H01L 2225/1058 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/3511 (2013.01); H05K 1/095 (2013.01); H05K 1/114 (2013.01); H05K 3/0073 (2013.01); H05K 3/383 (2013.01); H05K 2201/0195 (2013.01); H05K 2201/09845 (2013.01); H05K 2203/0392 (2013.01);
Abstract

A wiring substrate includes a first wiring structure and a second wiring structure. The first wiring structure includes a first insulating layer, which covers a first wiring layer, and a via wiring. A first through hole of the first insulating layer is filled with the via wiring. The second wiring structure includes a second wiring layer and a second insulating layer. The second wiring layer is formed on an upper surface of the first insulating layer and an upper end surface of the via wiring. The second wiring layer partially includes a roughened surface. The second insulating layer is stacked on the upper surface of the first insulating layer and covers the second wiring layer. The second wiring structure has a higher wiring density than the first wiring structure. The roughened surface of the second wiring layer has a smaller surface roughness than the first wiring layer.


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