The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2019
Filed:
Jan. 09, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Kris Bhaskar, San Jose, CA (US);
Scott Young, Soquel, CA (US);
Mark Roulo, Milpitas, CA (US);
Jing Zhang, Santa Clara, CA (US);
Laurent Karsenti, Rehovot, IL;
Mohan Mahadevan, Livermore, CA (US);
Bjorn Brauer, Beaverton, OR (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.