The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Mar. 22, 2018
Applicant:

Sandisk Technologies Llc, Plano, TX (US);

Inventors:

Mitsuteru Mushiga, Yokkaichi, JP;

Akio Nishida, Yokkaichi, JP;

Kenji Sugiura, Yokkaichi, JP;

Hisakazu Otoi, Yokkaichi, JP;

Masatoshi Nishikawa, Yokkaichi, JP;

Assignee:

SANDISK TECHNOLOGIES LLC, Addison, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/00 (2006.01); H01L 23/48 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 25/18 (2006.01); H01L 27/11582 (2017.01); H01L 27/11556 (2017.01);
U.S. Cl.
CPC ...
H01L 25/50 (2013.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/06 (2013.01); H01L 24/08 (2013.01); H01L 24/80 (2013.01); H01L 25/18 (2013.01); H01L 21/76843 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01); H01L 2224/03462 (2013.01); H01L 2224/03464 (2013.01); H01L 2224/05009 (2013.01); H01L 2224/05025 (2013.01); H01L 2224/0557 (2013.01); H01L 2224/05562 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/06181 (2013.01); H01L 2224/08146 (2013.01); H01L 2224/80895 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/14511 (2013.01);
Abstract

Sacrificial pillar structures are formed through a first semiconductor substrate on which first semiconductor devices are subsequently formed. After backside thinning of the first semiconductor substrate, the sacrificial pillar structures are replaced with integrated through-substrate via and pad structures to provide a first semiconductor chip. A second semiconductor chip is provided, which includes a second semiconductor substrate, second semiconductor devices, and second bonding pad structures electrically connected to a respective one of the second semiconductor devices. The first bonding pad structures are bonded to a respective one of the second bonding pad structures by surface activated bonding.


Find Patent Forward Citations

Loading…