The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Dec. 02, 2015
Tokyo Electron Limited, Tokyo, JP;
Seiwa Optical Co., Ltd., Tokyo, JP;
Muneaki Tamura, Yamanashi, JP;
Shinji Akaike, Yamanashi, JP;
Kenta Saiki, Yamanashi, JP;
Kazuhiko Koshimizu, Beaverton, OR (US);
Isao Okazaki, Tokyo, JP;
Mitsuya Kawatsuki, Tokyo, JP;
Kiyoshi Tsuda, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
SEIWA OPTICAL CO., LTD., Tokyo, JP;
Abstract
A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.