The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Nov. 02, 2017
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Chun-Wai Ng, Hsinchu, TW;
Hsueh-Liang Chou, Jhubei, TW;
Po-Chih Su, New Taipei, TW;
Ruey-Hsin Liu, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/092 (2006.01); H01L 21/8238 (2006.01); H01L 21/265 (2006.01); H01L 21/306 (2006.01); H01L 21/762 (2006.01); H01L 21/8234 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0922 (2013.01); H01L 21/26513 (2013.01); H01L 21/30604 (2013.01); H01L 21/76224 (2013.01); H01L 21/82385 (2013.01); H01L 21/823418 (2013.01); H01L 21/823437 (2013.01); H01L 21/823481 (2013.01); H01L 21/823487 (2013.01); H01L 21/823878 (2013.01); H01L 21/823885 (2013.01); H01L 21/823892 (2013.01); H01L 29/0649 (2013.01); H01L 29/0847 (2013.01); H01L 29/1095 (2013.01); H01L 29/4236 (2013.01); H01L 29/66621 (2013.01); H01L 29/66666 (2013.01); H01L 29/78 (2013.01); H01L 29/7827 (2013.01); H01L 29/42364 (2013.01); H01L 29/7813 (2013.01);
Abstract
A device includes a vertical transistor and a lateral transistor on a substrate, wherein the vertical transistor comprises a first gate in a first trench, a second gate in a second trench, a source and a drain, wherein the source and the drain are on opposite sides of the first trench and the lateral transistor and the drain are on opposite sides of the second trench.