The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Sep. 18, 2015
Taiwan Semiconductor Manufacturing Co., Ltd, Hsinchu, TW;
Peng-Ren Chen, Hsinchu, TW;
Shiang-Bau Wang, Taoyuan, TW;
Wen-Hao Cheng, Hsinchu, TW;
Yung-Jung Chang, Cyonglin Township, Hsinchu County, TW;
Wei-Chung Hu, New Taipei, TW;
Yi-An Huang, New Taipei, TW;
Jyun-Hong Chen, Taichung, TW;
TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
Methods and systems for diagnosing semiconductor wafer are provided. A target image is obtained according to graphic data system (GDS) information of a specific layout in the semiconductor wafer, wherein the target image includes a first contour having a first pattern corresponding to the specific layout. Image-based alignment is performed to capture a raw image from the semiconductor wafer according to the first contour. The semiconductor wafer is analyzed by measuring the raw image, so as to provide a diagnostic result.