The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
May. 21, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Pavan Kumar Perali, San Jose, CA (US);
Hucheng Lee, Cupertino, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Systems and methods for removing nuisance data from a defect scan of a wafer are disclosed. A processor receives a design file corresponding to a wafer having one or more z-layers. The processor receives critical areas of the wafer and instructs a subsystem to capture corresponding images of the wafer. Defect locations are received and the design file is aligned with the defect locations. Nuisance data is identified using the potential defect location and the one or more z-layers of the aligned design file. The processor then removes the identified nuisance data from the one or more potential defect locations.