The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Nov. 26, 2013
Asml Netherlands B.v., Veldhoven, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Markus Franciscus Antonius Eurlings, Tilburg, NL;
Hermanus Johannes Maria Kreuwel, Schijndel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A beam delivery apparatus is used with a laser produced plasma source. The beam delivery apparatus comprises variable zoom optics () operable to condition a beam of radiation so as to output a conditioned beam having a configurable beam diameter (b) and a plurality of mirrors () operable to direct the conditioned beam of radiation to a plasma generation site. The beam delivery apparatus enables control of the axial position of the beam where the beam has a particular diameter, with respect to the beam's focus position (). Also, a method is used to control the axial position of the location at a plasma generation site where a beam has a particular diameter, with respect to the beam's focus position.