The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Jun. 19, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Michael Patra, Oberkochen, DE;
Alexander Wolf, Oberkochen, DE;
Markus Schwab, Hannover, DE;
Toralf Gruner, Aalen-Hofen, DE;
Joachim Hartjes, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/28 (2006.01); G02B 5/09 (2006.01); G03F 7/20 (2006.01); G02F 1/1333 (2006.01); G02F 1/29 (2006.01); G02B 27/10 (2006.01); B29C 55/02 (2006.01); G02F 1/315 (2006.01);
U.S. Cl.
CPC ...
G02B 27/283 (2013.01); G02B 5/09 (2013.01); G02F 1/1333 (2013.01); G02F 1/29 (2013.01); G03F 7/702 (2013.01); G03F 7/70033 (2013.01); G03F 7/70208 (2013.01); G03F 7/70558 (2013.01); G03F 7/70991 (2013.01); B29C 55/023 (2013.01); G02B 27/10 (2013.01); G02F 1/315 (2013.01);
Abstract
An optical component for coupling out an individual output beam from a collective output beam includes a plurality of radiation-reflecting regions which are grouped in such a way that regions of the same group serve for guiding different partial beams of the individual output beam to the same scanner.