The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2019

Filed:

Jan. 10, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Rung-De Wang, Kaohsiung, TW;

Chen-Hsun Liu, Tainan, TW;

Chin-Yu Ku, Hsinchu, TW;

Te-Hsun Pang, Tainan, TW;

Chia-Hua Wang, Tainan, TW;

Pei-Shing Tsai, Tainan, TW;

Po-Chang Lin, Kaohsiung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/78 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/48 (2006.01); H01L 21/768 (2006.01); H01L 21/782 (2006.01); H01L 21/784 (2006.01); H01L 23/498 (2006.01); H01L 23/522 (2006.01); H01L 23/538 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/76898 (2013.01); H01L 23/3142 (2013.01); H01L 23/481 (2013.01); H01L 23/5226 (2013.01); H01L 21/78 (2013.01); H01L 21/782 (2013.01); H01L 21/784 (2013.01); H01L 21/823871 (2013.01); H01L 23/49827 (2013.01); H01L 23/5384 (2013.01);
Abstract

A semiconductor structure includes a semiconductor device, a first seal ring, a second seal ring, and a plurality of through semiconductor vias (TSV). The semiconductor device has a first surface and a second surface opposite to the first surface. The first seal ring is disposed on the first surface of the semiconductor device and is adjacent to edges of the first surface. The second seal ring is disposed on the second surface of the semiconductor device and is adjacent to edges of the second surface. The TSVs penetrate through the semiconductor device and physically connect the first seal ring and the second seal ring.


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