The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2019

Filed:

Jan. 22, 2014
Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Yusuke Ominami, Tokyo, JP;

Mitsugu Sato, Tokyo, JP;

Kenko Uchida, Tokyo, JP;

Sadamitsu Aso, Tokyo, JP;

Taku Sakazume, Tokyo, JP;

Hideo Morishita, Tokyo, JP;

Sukehiro Ito, Tokyo, JP;

Takashi Ohshima, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01); G01N 23/22 (2018.01); G01N 23/2251 (2018.01); G01N 23/2204 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01N 23/2204 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/2003 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24455 (2013.01); H01J 2237/2605 (2013.01);
Abstract

The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device () is characterized by having: a charged particle optical lens tube that irradiates a sample () with a primary charged particle beam; a sample stage on which a light emitting member () that emits light because of charged particles that have come by transmission internally in the sample () or scattering therefrom or a sample platform () having the light emitting member () is attachably and detachably disposed; and a detector () that detects the light emitted by the light emitting member.


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