The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2019
Filed:
Jan. 05, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Karthik Janakiraman, San Jose, CA (US);
Abhijit Basu Mallick, Fremont, CA (US);
Hari K. Ponnekanti, San Jose, CA (US);
Mandyam Sriram, San Jose, CA (US);
Alexandros T. Demos, Fremont, CA (US);
Mukund Srinivasan, Fremont, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Dale R. Dubois, Los Gatos, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
An apparatus and method for processing a substrate in a processing system containing a deposition chamber, a treatment chamber, and an isolation region, separating the deposition chamber from the treatment is described herein. The deposition chamber deposits a film on a substrate. The treatment chamber receives the substrate from the deposition chamber and alters the film deposited in the deposition chamber with a film property altering device. Processing systems and methods are provided in accordance with the above embodiment and other embodiments.