The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2019
Filed:
Jul. 26, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Clinton Sakata, San Jose, CA (US);
Hui Chen, Burlingame, CA (US);
Jim K. Atkinson, Los Gatos, CA (US);
Tomohiko Kitajima, Santa Clara, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A buff module and method for using the same are provided. In one embodiment, a buff module includes housing having an interior volume, a plurality of drive rollers and a pair of buff heads. The drive rollers are arranged to rotate a substrate within the interior volume on a substantially horizontal axis. The buff heads are disposed in the housing, each buff head rotatable on an axis substantially aligned with the horizontal axis and movable to a position substantially parallel with the horizontal axis.