The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Jun. 27, 2017
Nuflare Technology, Inc., Yokohama-shi, JP;
Toshiaki Otaki, Yokohama, JP;
Riki Ogawa, Kawasaki, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
A focusing apparatus includes a first reticle, arranged at the front side of a conjugate position of a TDI sensor; a second reticle, arranged at the back side of the conjugate position; an equalizing circuit to perform gray scale value equalization by using a gray scale value output by the TDI sensor which received the pattern image by illumination light not passing through the first and second reticles; and a distance change/move amount calculation circuit to calculate, in a state where the gray scale value equalization has been performed, a distance change/move amount of a relative distance, for focusing the pattern image of the substrate, between the substrate and the conjugate position of the TDI sensor by using a first derivative value of a gray scale value output by the TDI sensor which received the pattern image by the reflection illumination light having passed through the first and second reticles.