The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Nov. 04, 2015
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Han-Kwang Nienhuys, Veldhoven, NL;
Sjoerd Nicolaas Lambertus Donders, Veldhoven, NL;
Gosse Charles De Vries, Veldhoven, NL;
Michael Jozef Mathijs Renkens, Veldhoven, NL;
Erik Roelof Loopstra, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 5/18 (2006.01); G02B 7/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70891 (2013.01); G02B 5/1838 (2013.01); G02B 5/1861 (2013.01); G02B 7/1815 (2013.01); G03F 7/2008 (2013.01); G03F 7/7095 (2013.01); G03F 7/70266 (2013.01);
Abstract
A reflector () comprising a plate () supported by a substrate (), wherein the plate has a reflective surface () and is secured to the substrate by adhesive free bonding, and wherein a cooling channel array () is provided in the reflector. The channels () of the cooling channel array may be formed from open channels in a surface of the substrate, the open channels being closed by the plate to create the channels.