The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2019
Filed:
May. 09, 2016
Zeta Instruments, Inc., San Jose, CA (US);
Zhen Hou, Fremont, CA (US);
James Jianguo Xu, San Jose, CA (US);
Ken Kinsun Lee, Los Altos Hills, CA (US);
James Nelson Stainton, San Jose, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Rusmin Kudinar, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.