The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2019
Filed:
Nov. 20, 2017
Asml Netherlands B.v., Veldhoven, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Gerardus Adrianus Antonius Maria Kusters, Eindhoven, NL;
Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Koen Steffens, Veldhoven, NL;
Takeshi Kaneko, 's-Hertogenbosch, NL;
Robbert Jan Voogd, Neerpelt, BE;
Gregory Martin Mason Corcoran, Eindhoven, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Ramin Badie, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A substrate table to support a substrate on a substrate supporting area, the substrate table having a heat transfer fluid channel at least under the substrate supporting area, and a plurality of heaters and/or coolers to thermally control the heat transfer fluid in the channel at a location under the substrate supporting area.