The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Jun. 14, 2017
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Suzanne M. Coley, Mansfield, MA (US);
Paul J. LaBeaume, Auburn, MA (US);
Shintaro Yamada, Shrewsbury, MA (US);
Cecilia W. Kiarie, Shrewsbury, MA (US);
Li Cui, Westborough, MA (US);
Bhooshan Popere, Marlborough, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); C08G 77/04 (2006.01); C09D 183/04 (2006.01); C09D 5/00 (2006.01); G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/09 (2006.01); G03F 7/32 (2006.01); C09D 7/20 (2018.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0276 (2013.01); C08G 77/04 (2013.01); C09D 5/006 (2013.01); C09D 7/20 (2018.01); C09D 183/04 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/091 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01); C08G 77/80 (2013.01);
Abstract
Compositions for forming thin, silicon-containing antireflective coatings and methods of using these compositions in the manufacture of electronic devices are provided. Silicon-containing antireflective coatings formed from these compositions can be easily removed during processing without the need for a separate removal step.