The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Aug. 12, 2014
Applicant:
Air Products and Chemicals, Inc., Allentown, PA (US);
Inventors:
Ronald Martin Pearlstein, San Marcos, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Assignee:
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Primary Examiner:
Int. Cl.
CPC ...
C09D 5/00 (2006.01); H01L 21/02 (2006.01); C23C 16/40 (2006.01); C23C 16/452 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02164 (2013.01); C09D 5/00 (2013.01); C23C 16/401 (2013.01); C23C 16/402 (2013.01); C23C 16/452 (2013.01); H01L 21/02126 (2013.01); H01L 21/02211 (2013.01); H01L 21/02216 (2013.01); H01L 21/02271 (2013.01); H01L 21/02282 (2013.01);
Abstract
Described herein are compositions or formulations for forming a film in a semiconductor deposition process, such as without limitation, a flowable chemical vapor deposition of silicon oxide. Also described herein is a method to improve the surface wetting by incorporating an acetylenic alcohol or diol surfactant such as without limitation 3,5-dimethyl-1-hexyn-3-ol, 2,4,7,9-tetramethyl-5-decyn-4,7-diol, 4-ethyl-1-octyn-3-ol, and 2,5-dimethylhexan-2,5-diol, and other related compounds.