Probe guide, probe card, and method for probe guide manufacturing

Abstract

OBJECT To improve the strength of a probe guide and improve the abrasion resistance of the probe guide. MEANS FOR SETTLEMENT A guide plateis formed of a silicon platehaving guide holesrespectively adapted to support contact probes, the inner walls of the guide holesinclude a guide filmformed on the inner wall surfaces of corresponding penetration-processed holesof the silicon plate, the cross-sectional areas of the penetration-processed holesgradually increase toward a first surface of the silicon plate, and the film thickness of the guide filmgradually increases toward the first surface of the silicon plate. By employing such a configuration, as compared with the tilts of the inner wall surfaces of the penetration-processed holes, the tilts of the inner wall surfaces of the guide holescan be suppressed, and the strength of the silicon platecan be improved. Accordingly, the abrasion resistance of a probe guidecan be improved.