Three-dimensional imaging in charged-particle microscopy

Abstract

A method of investigating a specimen using charged-particle microscopy, and a charged particle microscope configured for same. In one embodiment, the method includes: (a) selecting a virtual sampling grid on a surface of a specimen, the virtual sampling grid extending in an XY plane and comprising nodes to be impinged upon by a beam of charged particles; (b) selecting a landing energy for the beam, the landing energy associated with a penetration depth; (c) generating a scan image by irradiating the specimen at each of the nodes with the beam, and detecting output radiation emanating from the specimen in response thereto; (d) repeating steps (b) and (c) for a series of different landing energies corresponding to an associated series of penetration depths, (e) pre-selecting an energy increment by which the landing energy is to be altered after a first iteration of steps (b) and (c); (f) associating the energy increment with a corresponding depth increment; (g) selecting the virtual sampling grid to have a substantially equal node pitch p in X and Y, which pitch p is matched to the value of the depth increment so as to produce a substantially cubic sampling voxel; and (h) selecting subsequent energy values in the series of landing energies so as to maintain a substantially constant depth increment between consecutive members of the series of penetration depths.