The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Dec. 12, 2016
Nuflare Technology, Inc., Yokohama-shi, JP;
Hideki Nukada, Yokohama, JP;
Nobutaka Kikuiri, Koganei, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
A pattern inspection apparatus includes a stage to mount thereon a substrate with patterns formed thereon and be able to move two-dimensionally, plural detectors of a two-dimensional scale, whose height positions are mutually different and arranged at positions on the stage different from the substrate position, to perform measurement, the body of the two-dimensional scale arranged fixed to a position facing the plural detectors, a sensor to acquire an optical image of the pattern on the substrate, in a state where the stage with the substrate is moving in one direction on a surface for the two-dimensional movement, a calculation circuitry to calculate an image acquiring position of the optical image by using position information measured by the two-dimensional scale, and a comparison circuitry to compare, using a reference image corresponding to the image acquiring position of the optical image, the optical image with the reference image for each pixel.