The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Oct. 18, 2016
Asml Netherlands B.v., Veldhoven, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Adrianus Hendrik Koevoets, Mierlo, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Menno Fien, Tilburg, NL;
Antonius Franciscus Johannes De Groot, Someren, NL;
Christiaan Alexander Hoogendam, Westerhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Nicolaas Ten Kate, Almkerk, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Jan Steven Christiaan Westerlaken, Heesch, NL;
Jim Vincent Overkamp, Eindhoven, NL;
Maarten Van Beijnum, Eindhoven, NL;
ASML NETHERLANDS, B.V., Veldhoven, NL;
Abstract
A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.