The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Jan. 06, 2017
Applicants:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss Ag, Oberkochen, DE;
Inventors:
Jan Hendrik Peters, Radebeul, DE;
Jörg Frederik Blumrich, Jena, DE;
Dirk Seidel, Jena, DE;
Christoph Husemann, Jena, DE;
Assignees:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/22 (2012.01); G03F 1/84 (2012.01); G01N 21/33 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01); G01N 21/33 (2013.01); G01N 21/88 (2013.01); G03F 1/22 (2013.01);
Abstract
In a method for localizing defects on a substrate for EUV masks, a phase contrast optical unit having a phase mask is used for examining the substrate.