The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 2018

Filed:

Jun. 18, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

David G. Brochu, Jr., East Hardwick, VT (US);

Roger A. Dufresne, Fairfax, VT (US);

Baozhen Li, South Burlington, VT (US);

Barry P. Linder, Hastings-on-Hudson, NY (US);

James H. Stathis, Poughquag, NY (US);

Ernest Y. Wu, Essex Junction, VT (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/66 (2006.01); G01R 31/44 (2006.01); G01R 27/26 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76885 (2013.01); G01R 27/2617 (2013.01); G01R 31/2856 (2013.01); G01R 31/44 (2013.01); H01L 22/34 (2013.01);
Abstract

Methods and test structures for testing the reliability of a dielectric material. The test structure may include a first row of contacts and a line comprised of a conductor. The line is laterally spaced in a direction at a minimum distance from the first row of contacts. The test structure further includes a second row of contacts laterally spaced in the direction from the first row of contacts by a distance equal to two times a minimum pitch. The line is laterally positioned between the first row of contacts and the second row of contacts.


Find Patent Forward Citations

Loading…