The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Nov. 08, 2016
Jeong-ju Park, Hwaseong-si, KR;
Seung-chul Kwon, Suwon-si, KR;
Eun-sung Kim, Seoul, KR;
Kyeong-mi Lee, Suwon-si, KR;
Shi-yong Yi, Seongnam-si, KR;
Tsuyosh Kurosawa, Kanagawa-ken, JP;
Katsumi Ohmori, Kanagawa-ken, JP;
Tasuku Matsumiya, Kanagawa-ken, JP;
Jeong-Ju Park, Hwaseong-si, KR;
Seung-Chul Kwon, Suwon-si, KR;
Eun-Sung Kim, Seoul, KR;
Kyeong-Mi Lee, Suwon-si, KR;
Shi-Yong Yi, Seongnam-si, KR;
Tsuyosh Kurosawa, Kanagawa-ken, JP;
Katsumi Ohmori, Kanagawa-ken, JP;
Tasuku Matsumiya, Kanagawa-ken, JP;
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-do, KR;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, Kanagawa, JP;
Abstract
In a method of forming patterns, an object layer is formed on a substrate. Guide patterns are formed on the object layer. A brush layer is formed using a brush polymer on surfaces of the guide patterns. The brush polymer includes at least one of a first brush polymer and a second brush polymer. The first brush polymer includes a hydrophobic repeating unit and a hydrophilic terminal group having at least two hydroxyl groups. The second brush polymer includes a hydrophobic repeating unit and a hydrophilic random repeating unit having a hydroxyl group. A self-aligned layer is formed using a block copolymer on the brush layer to form blocks aligned around the guide patterns. At least a portion of the blocks is transferred to the object layer.