The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Sep. 01, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Fine Semitech Corp., Gyeonggi-do, Hwaseong-si, KR;
Byungchul Yoo, Yongin-si, KR;
Sungyong Cho, Suwon-si, KR;
Jaehyuck Choi, Seoul, KR;
Jeongsu Yang, Bucheon-si, KR;
Donghoon Chung, Yongin-si, KR;
Han-Shin Lee, Hwaseong-si, KR;
Myungjun Kim, Osan-si, KR;
Ikjun Kim, Osan-si, KR;
Jikang Kim, Osan-si, KR;
Jeonghwan Min, Osan-si, KR;
Kyoungchae Seo, Osan-si, KR;
Samsung Electronics Co., Ltd., , KR;
Fine Semitech Corp., , KR;
Abstract
A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.