The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Sep. 23, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Abdul Aziz Khaja, San Jose, CA (US);
Mohamad A. Ayoub, Los Gatos, CA (US);
Ramesh Bokka, Milpitas, CA (US);
Jay D. Pinson, II, San Jose, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A remote plasma source is disclosed that includes a core element and a first plasma block including one or more surfaces at least partially enclosing an annular-shaped plasma generating region that is disposed around a first portion of the core element. The remote plasma source further comprises one or more coils disposed around respective second portions of the core element. The remote plasma source further includes an RF power source configured to drive a RF power signal onto the one or more coils that is based on a determined impedance of the plasma generating region. Energy from the RF power signal is coupled with the plasma generating region via the one or more coils and the core element.