The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Jul. 24, 2015
Nanometrics Incorporated, Milpitas, CA (US);
Andrew S. Klassen, San Jose, CA (US);
Andrew J. Hazelton, San Carlos, CA (US);
Andrew H. Barada, Portola Valley, CA (US);
Todd M. Petit, Livermore, CA (US);
Chuan Sheng Tu, Zhubei, TW;
Nanometrics Incorporated, Milpitas, CA (US);
Abstract
An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device, and a reference chip purge device provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. The reference chip purge device may be static or movable with the reference chip.