The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2018
Filed:
Jun. 29, 2017
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Frank Truong, Gilbert, AZ (US);
Praneeth Akkinepally, Chandler, AZ (US);
Shruti R. Jaywant, Chandler, AZ (US);
Dilan Seneviratne, Phoenix, AZ (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3105 (2006.01); H01L 21/312 (2006.01); H01L 21/4757 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31053 (2013.01); H01L 21/02354 (2013.01); H01L 21/31058 (2013.01); H01L 21/76805 (2013.01); H01L 21/76819 (2013.01); H01L 21/76885 (2013.01); H01L 23/5283 (2013.01);
Abstract
An interlayer dielectric material includes a planar surface that exhibits planarity due to raster-patterned decomposition products due to use of a confocal light beam. The planar surface encompasses a filled via that is in electrical and physical contact with a bond pad that is also on the planar surface.