The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Mar. 28, 2017
Applicant:
Cascade Microtech, Inc., Beaverton, OR (US);
Inventors:
Timothy Allen McMullen, Lino Lakes, MN (US);
Jeffery Allan Shepler, Vadnais Heights, MN (US);
Clint Vander Giessen, Beaverton, OR (US);
Assignee:
FormFactor Beaverton, Inc., Beaverton, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
G01R 31/003 (2013.01);
Abstract
Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.