The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Mar. 22, 2017
Applicants:

United Microelectronics Corp., Hsin-Chu, TW;

Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian province, CN;

Inventors:

Ger-Pin Lin, Tainan, TW;

Yung-Ming Wang, Taichung, TW;

Tien-Chen Chan, Tainan, TW;

Shu-Yen Chan, Changhua County, TW;

Assignees:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Fujian Jinhua Integrated Circuit Co., Ltd., Quanzhou, Fujian province, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 27/108 (2006.01); H01L 21/265 (2006.01); H01L 29/10 (2006.01); H01L 29/49 (2006.01); H01L 21/762 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10876 (2013.01); H01L 21/26513 (2013.01); H01L 21/76237 (2013.01); H01L 27/10823 (2013.01); H01L 29/105 (2013.01); H01L 29/1037 (2013.01); H01L 29/1041 (2013.01); H01L 29/4236 (2013.01); H01L 29/495 (2013.01); H01L 29/66621 (2013.01); H01L 29/78 (2013.01);
Abstract

A method for fabricating semiconductor device includes the steps of: providing a substrate having a memory region defined thereon; forming a trench in the substrate; performing a first ion implantation process to form a first doped region having a first conductive type in the substrate adjacent to the trench; forming a gate electrode in the trench; and performing a second ion implantation process to form a second doped region having a second conductive type in the substrate above the gate electrode.


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