The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Feb. 23, 2017
Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Motohiro Takahashi, Tokyo, JP;

Yoshimasa Fukushima, Tokyo, JP;

Katsunori Onuki, Tokyo, JP;

Tetsuya Niibori, Hitachinaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/18 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/261 (2013.01);
Abstract

There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.


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Takahashi, Motohiro. (2018). Charged particle beam apparatus and vibration damper for charged particle beam apparatus (U.S. Patent No. 10056226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10056226

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